The Development of Manufacturing Technology of CVD Diamond Thick Film Tools

International Conference on Manufacturing Technology, Materials and Chemical Engineering

材料科学;化学工业

Shi, Haohao^1 ; Chen, Feng^1 ; Zhou, Yidan^1

School of Mechanical Engineering, Nantong University, Jiangsu Nantong

226019, China^1

关键词: CVD Diamond;    Development trends;    Edge polishing;    Manufacturing technologies;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/592/1/012064/pdf
DOI  :  10.1088/1757-899X/592/1/012064

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

The key manufacturing technology of CVD diamond thick film tools is introduced, including thick film preparation, cutting, welding and edge polishing. The problems existing in manufacturing of CVD diamond thick film tools are analysed. The development trends of manufacturing technology of CVD diamond thick film tools are discussed.