Finite Element Analysis of PGM Process for Wafer Based Lens Array

International Conference on Manufacturing Technology, Materials and Chemical Engineering

材料科学;化学工业

Hu, Yang^1 ; Zhou, Jian^2 ; Li, Mujun^1 ; Shen, Lianguan^1

Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Anhui

230026, China^1

Institute of Tribology, Hefei University of Technology, Hefei, Anhui

230009, China^2

关键词: 3D finite element model;    Assessment criteria;    Glass wafer;    Holding pressure;    Lens array;    Molding pressure;    Process parameters;    Submodels;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/592/1/012024/pdf
DOI  :  10.1088/1757-899X/592/1/012024

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

In order to study the PGM process for wafer based lens array, we established a 3D finite element model of glass wafer with lens array by using the submodel technique in ABAQUS. Then assessment criteria of the molded lens and influence of different PGM process parameters were investigated thoroughly. The obtained results show that during the molding stage, proper molding pressure can help the lens fill better and decrease the sag height deviation significantly. While during the annealing stage, holding pressure is essential for keeping the molded lens' structure and position, but residual stress must be considered at the same time.