Amplitude control system of drive-mode oscillations of MEMS gyroscopes

3rd International Conference "Cognitive Robotics"

计算机科学

Nesterenko, T.G.^1 ; Barbin, E.S.^1 ; Baranov, P.F.^1 ; Hao, Lo Van^1

National Research Tomsk Polytechnic University, Tomsk, Russia^1

关键词: Amplitude control;    Capacitance change;    Comb structure;    Inertial forces;    Linear accelerations;    MEMS gyroscope;    Operating modes;    Rotational rates;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/516/1/012009/pdf
DOI  :  10.1088/1757-899X/516/1/012009

学科分类：计算机科学（综合）

来源: IOP

【 摘 要 】

Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.