会议论文详细信息
2nd International Telecommunication Conference "Advanced Micro- and Nanoelectronic Systems and Technologies"
Algorithmization and optimization of processes for integrated electronics engineering
Kravets, O.Ja.^1 ; Choporov, O.N.^1 ; Preobrazhenskiy, A.P.^2 ; Varlamov, N.V.^3
Voronezh State Technical University, Moscow district, 14, Voronezh, Russia^1
Voronezh Institute of High Technologies, Lenina street, 73a, Voronezh, Russia^2
National Research Nuclear University (MEPhI), Kashirskoe shosse 31, Moscow
115409, Russia^3
关键词: Adjustment model;    Functional block diagrams;    Information schema;    Integrated electronics;    Process equipments;    Technical requirement;    Technological process;    Technological solution;   
Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/498/1/012041/pdf
DOI  :  10.1088/1757-899X/498/1/012041
来源: IOP
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【 摘 要 】
This paper discusses the challenges of taking a technological solution based on certain requirements, with the existence of several alternative options (alternatives) with regard to the technical requirements in the manufacture of integrated circuits, as listed in the following. The algorithm of the choice of process equipment during the production of integrated electronics is developed. The functional block diagram of an adaptive system with an adjustable model is given. The structure of the information schema implementation of the adjustment model of technological production of integrated electronics is given. The developed model of the technological process of production of integrated electronics is presented. The stages of optimization of production of integrated electronics are given. The algorithm of control of technological process of production of integrated electronics is developed.
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